WEKO3
アイテム
{"_buckets": {"deposit": "3e716e23-5ae0-4b88-90bd-7dcfdb2875da"}, "_deposit": {"created_by": 3, "id": "1011", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "1011"}, "status": "published"}, "_oai": {"id": "oai:aue.repo.nii.ac.jp:00001011", "sets": ["130"]}, "author_link": ["1175", "25"], "item_3_alternative_title_1": {"attribute_name": "その他のタイトル", "attribute_value_mlt": [{"subitem_alternative_title": "Effects of Ozone on Thermal Oxidation of Silicon"}]}, "item_3_biblio_info_7": {"attribute_name": "書誌事項", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "2000-03-01", "bibliographicIssueDateType": "Issued"}, "bibliographicPageEnd": "65", "bibliographicPageStart": "57", "bibliographicVolumeNumber": "49", "bibliographic_titles": [{"bibliographic_title": "愛知教育大学研究報告. 芸術・保健体育・家政・技術科学"}]}]}, "item_3_description_27": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"subitem_description": "text", "subitem_description_type": "Other"}]}, "item_3_description_5": {"attribute_name": "抄録", "attribute_value_mlt": [{"subitem_description": "Thermal oxidation of Silicon a mixed oxygen and ozone ambient in the temperature range of 400℃-800℃ is reported. Beteen 400℃ and 600℃ a large enhancement in oxidation is observed compared with conventional oxide growth in a pure oxygen ambient. For temperature above 800℃ conventional thermal oxidation dominates and no significant enhancement is found. Effects of Ozone in short-time oxidation is more remarkable than in long-time oxidation, reflecting that surface reaction dominates in short-time oxidation.", "subitem_description_type": "Abstract"}]}, "item_3_link_3": {"attribute_name": "研究者総覧へのリンク", "attribute_value_mlt": [{"subitem_link_text": "清水, 秀己", "subitem_link_url": "https://souran.aichi-edu.ac.jp/person/698d51a19d8a121ce581499d7b701668ja.html"}]}, "item_3_publisher_8": {"attribute_name": "出版者", "attribute_value_mlt": [{"subitem_publisher": "愛知教育大学"}]}, "item_3_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AN00006773", "subitem_source_identifier_type": "NCID"}]}, "item_3_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "0388-7367", "subitem_source_identifier_type": "ISSN"}]}, "item_3_text_10": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"subitem_text_value": "愛知教育大学研究報告, 芸術・保健体育・家政・技術科学. 2000, 49, p.57-65."}]}, "item_3_text_26": {"attribute_name": "著者別名", "attribute_value_mlt": [{"subitem_text_value": "シミズ, ヒデキ"}, {"subitem_text_value": "タネムラ, シュウイチ"}, {"subitem_text_value": "Tanemura, Shuichi"}]}, "item_3_text_29": {"attribute_name": "旧登録日", "attribute_value_mlt": [{"subitem_text_value": "2008-12-04T05:58:08Z"}]}, "item_3_text_30": {"attribute_name": "旧公開日", "attribute_value_mlt": [{"subitem_text_value": "2008-12-04T05:58:08Z"}]}, "item_3_text_31": {"attribute_name": "旧ソートキー", "attribute_value_mlt": [{"subitem_text_value": "09"}]}, "item_3_text_4": {"attribute_name": "著者(別言語)", "attribute_value_mlt": [{"subitem_text_value": "Shimizu, Hideki"}, {"subitem_text_value": "Tanemura, Syuichi"}]}, "item_3_version_type_14": {"attribute_name": "著者版フラグ", "attribute_value_mlt": [{"subitem_version_resource": "http://purl.org/coar/version/c_970fb48d4fbd8a85", "subitem_version_type": "VoR"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "清水, 秀己"}], "nameIdentifiers": [{"nameIdentifier": "25", "nameIdentifierScheme": "WEKO"}, {"nameIdentifier": "70126936", "nameIdentifierScheme": "e-Rad", "nameIdentifierURI": "https://kaken.nii.ac.jp/ja/search/?qm=70126936"}, {"nameIdentifier": "70126936", "nameIdentifierScheme": "KAKEN - 研究者検索", "nameIdentifierURI": "https://nrid.nii.ac.jp/ja/nrid/1000070126936/"}]}, {"creatorNames": [{"creatorName": "種村, 修一"}], "nameIdentifiers": [{"nameIdentifier": "1175", "nameIdentifierScheme": "WEKO"}]}]}, "item_files": {"attribute_name": "ファイル情報", "attribute_type": "file", "attribute_value_mlt": [{"accessrole": "open_date", "date": [{"dateType": "Available", "dateValue": "2017-03-27"}], "displaytype": "detail", "download_preview_message": "", "file_order": 0, "filename": "kengei495765.pdf", "filesize": [{"value": "283.7 kB"}], "format": "application/pdf", "future_date_message": "", "is_thumbnail": false, "licensetype": "license_free", "mimetype": "application/pdf", "size": 283700.0, "url": {"label": "kengei495765.pdf", "url": "https://aue.repo.nii.ac.jp/record/1011/files/kengei495765.pdf"}, "version_id": "6d4d0e24-5fb5-4e9c-98ad-ea7c7984e2a4"}]}, "item_keyword": {"attribute_name": "キーワード", "attribute_value_mlt": [{"subitem_subject": "熱酸化", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Thermal Oxidation", "subitem_subject_scheme": "Other"}, {"subitem_subject": "オゾン", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Ozone", "subitem_subject_scheme": "Other"}, {"subitem_subject": "シリコン", "subitem_subject_scheme": "Other"}, {"subitem_subject": "Silicon", "subitem_subject_scheme": "Other"}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "シリコン熱酸化膜形成におけるオゾンの促進効果", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "シリコン熱酸化膜形成におけるオゾンの促進効果"}]}, "item_type_id": "3", "owner": "3", "path": ["130"], "permalink_uri": "http://hdl.handle.net/10424/643", "pubdate": {"attribute_name": "公開日", "attribute_value": "2008-12-04"}, "publish_date": "2008-12-04", "publish_status": "0", "recid": "1011", "relation": {}, "relation_version_is_last": true, "title": ["シリコン熱酸化膜形成におけるオゾンの促進効果"], "weko_shared_id": 3}
シリコン熱酸化膜形成におけるオゾンの促進効果
http://hdl.handle.net/10424/643
http://hdl.handle.net/10424/643f84a393f-6f56-4258-ab1f-913a9a0db076
名前 / ファイル | ライセンス | アクション |
---|---|---|
kengei495765.pdf (283.7 kB)
|
|
Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 2008-12-04 | |||||
タイトル | ||||||
タイトル | シリコン熱酸化膜形成におけるオゾンの促進効果 | |||||
言語 | ||||||
言語 | jpn | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | 熱酸化 | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Thermal Oxidation | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | オゾン | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Ozone | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | シリコン | |||||
キーワード | ||||||
主題Scheme | Other | |||||
主題 | Silicon | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
その他のタイトル | ||||||
その他のタイトル | Effects of Ozone on Thermal Oxidation of Silicon | |||||
著者 |
清水, 秀己
× 清水, 秀己× 種村, 修一 |
|||||
研究者総覧へのリンク | ||||||
清水, 秀己 | ||||||
https://souran.aichi-edu.ac.jp/person/698d51a19d8a121ce581499d7b701668ja.html | ||||||
著者(別言語) | ||||||
Shimizu, Hideki | ||||||
著者(別言語) | ||||||
Tanemura, Syuichi | ||||||
抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Thermal oxidation of Silicon a mixed oxygen and ozone ambient in the temperature range of 400℃-800℃ is reported. Beteen 400℃ and 600℃ a large enhancement in oxidation is observed compared with conventional oxide growth in a pure oxygen ambient. For temperature above 800℃ conventional thermal oxidation dominates and no significant enhancement is found. Effects of Ozone in short-time oxidation is more remarkable than in long-time oxidation, reflecting that surface reaction dominates in short-time oxidation. | |||||
書誌事項 |
愛知教育大学研究報告. 芸術・保健体育・家政・技術科学 巻 49, p. 57-65, 発行日 2000-03-01 |
|||||
出版者 | ||||||
出版者 | 愛知教育大学 | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 0388-7367 | |||||
書誌情報 | ||||||
愛知教育大学研究報告, 芸術・保健体育・家政・技術科学. 2000, 49, p.57-65. | ||||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00006773 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
著者別名 | ||||||
シミズ, ヒデキ | ||||||
著者別名 | ||||||
タネムラ, シュウイチ | ||||||
著者別名 | ||||||
Tanemura, Shuichi | ||||||
資源タイプ | ||||||
内容記述タイプ | Other | |||||
内容記述 | text |